[주]파웰 코퍼레이션 뉴스 강창수 파웰코퍼레이션 대표, 실시간 플라즈마 측정 가능한 ‘정전척’ 개발
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(서울=NSP통신) 박유니 기자 = 미국 인플레이션감축법(IRA)과 반도체지원법, 미국 주도 반도체 동맹(Chip4) 등의 현안으로 국내 반도체 산업에 위기와 기회가 공존하고 있는 요즘 그동안 쌓아온 기술 축적과 노하우를 바탕으로 지속적인 연구개발을 통해 품질을 인정받은 기업이 있다.
1999년 설립된 파웰코퍼레이션이 그 주인공이다. 반도체와 디스플레이에 필요한 장치·부품의 국산화와 수입 다변화를 추진해 온 파웰코퍼레이션은 10여명의 직원이 소재·기술개발, 국내 유수의 반도체 회사와의 기술협업과 제품 공급 등을 지속적으로 진행하고 있다.
강창수 파웰코퍼레이션 대표는 “미래를 꿈꾸고 모든 임직원이 같은 곳을 바라보며 나아갈 길을 만드는 기업만이 무한 경쟁시대에서 존재 할 수 있다”면서 “고객 만족을 위한 ‘베스트 서비스’에 창조와 융합이라는 가치를 더해 고객을 위한 더 좋은 품질의 제품과 서비스를 만들기 위해 노력하고 있다”고 말했다.
현재 상용되는 플라즈마 측정 센서는 플라즈마의 절대값을 측정 하는 것이 아니라 상대적인 값만을 측정하며, 장비 가동 중 실시간 측정이 어렵다는 단점이 있다.
이에 파웰코퍼레이션은 국내뿐 아니라 글로벌 장치사의 폭 넓은 요구에 대응하기 위해 반도체 공정에 사용되는 제품과 통합 솔루션 개발에 나서 상용화 단계에 이르렀다. 플라즈마 센서가 내장된 정전척을 개발함으로 플라즈마 상태 측정의 새로운 방안을 제시할 수 있게 됐다는 게 강 대표의 설명이다.
파웰의 플라즈마 밀도 센서 임베디드 ESC 시스템 ‘PDS ESC(Plasma Density real-time Monitoring System)’는 진공 챔버 내에서 활성화 되는 플라즈마의 밀도를 측정하는 평판형 컷오프 센서를 ESC에 적용한 시스템이다. 플라즈마 밀도를 실시간으로 측정하여 생산 공정 관리를 할 수 있는 신개념 시스템이다.
평판형 플라즈마 밀도 센서가 부착된 ESC는 반도체 전공정 장비의 플라즈마 상태 모니터링 외에도 관련된 센서들과 융합을 통해 4차 산업시대에 걸 맞는 AI 장비 제어가 가능하다. 예지 정비(PHM) 측면에서도 매우 유용하게 사용될 것으로 기대돼 국내외 기업과도 협업 중이다.
그는 “식각·증착·세정 등의 핵심공정에서 웨이퍼에 입사하는 플라즈마 밀도 양이 공정 결과에 결정적 역할을 한다. 반도체 공정 난이도 심화에 따른 플라즈마 밀도 균일도 측정이 필요하다”며 “기존 한계점을 극복하는 평판형 플라즈마 센서 개발해 반도체 생산 공정 상황에 대한 리얼타임 관리와 이를 통한 생산 안정화와 생산 수율 향상을 이뤄낼 수 있다”고 말했다.
또한 현재 반도체 장비에서 인공지능 반도체 장비로의 전환의 흐름을 타기 위해서는 파웰의 제품을 탑재할 가능성이 높다고 보고 있다. 플라즈마 밀도 센서가 내장된 정전척은 원격을 통해 인공지능까지 이용할 수 있는 만큼 이보다 좋은 제품이 없다는 판단이다.
강 대표는 “한국에서의 성공적인 사업화를 토대로 이후 미국·일본·대만·유럽 등으로 사업 확장을 목표로 최선을 다해 비즈니스에 임하고 있다”고 말했다.
NSP통신 박유니 기자 ynpark@nspna.com
- 이전글파웰코퍼레이션 한국중소벤처포럼 '2022 송년 전국 워크숍 개최 참가(김명수 이사장 취임) 23.12.19
- 다음글파웰코퍼레이션 반도체 플라즈마 측정 '정전척(ESC)' 기업 [반도체코리아] 23.12.19
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